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    請使用永久網址來引用或連結此文件: https://irlib.pccu.edu.tw/handle/987654321/24132


    題名: New approaches of mold fabrication for nanoimprint lithography
    作者: Lin, CH (Lin, Chien-Hung)
    Chen, RS (Chen, Rongshun)
    貢獻者: Dept Mech Engn
    關鍵詞: nanoimprint lithography
    mold fabrication
    master
    anodized aluminum oxide
    日期: 2011-01
    上傳時間: 2013-01-31 15:31:01 (UTC+8)
    摘要: We present the new mold fabrications for nanoimprint lithography for the application of ordered array of rod or pore patterning. The concave and convex types of the mold are achieved. For this technology, the master is required preparation before the mold fabrication. The master is utilized by step and repeated to achieve the structures over a large area on the mold. The master, mold, and imprint results demonstrate that the new approaches of mold fabrication could be a feasible scheme with low cost and high throughput. (C) 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.3564881]
    關聯: JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 卷: 10 期: 1 文獻號碼: 011506
    顯示於類別:[機械工程系暨機械工程學系數位機電研究所] 期刊論文

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