Measurement of spatial distributions of electron density and electron temperature in direct current glow discharge by double langmuir probes

文化大學機構典藏 CCUR > 理工學院 > 工學院 > 化學工程與材料工程學系暨碩士班 > 期刊論文 > Item 987654321/2966

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题名:	Measurement of spatial distributions of electron density and electron temperature in direct current glow discharge by double langmuir probes
作者:	Tao W.H. Yasuda H.K.
贡献者:	材料所
关键词:	glow discharged plasma diagnostic double Langmuir probe electron temperature electron density
日期:	2002
上传时间:	2009-12-07 11:35:22 (UTC+8)
摘要:	The spatial distributions of electron temperature and density in a dc glow discharge that is created by a pair of planar electrodes were obtained by using double Langmuir probes, The contribution of double Langmuir probes measurement is to provide a relatively, quantitative tool to identify the electron distribution behavior. Electrons gain energy, from the imposed electric field, and electron temperature (T-e) rises very sharply,from the cathode to the leading edge of the negative glow where T-e reaches the maximum. In this region, the number of electrons (N-e) is relatively small and does not increase much. The accelerated electrons lose energy, by ionizing gas atoms, and T-e decreases rapidly from the trailing edge of the negative glow and extends to the anode. N-e was observed to increase from the cathode to the anode, which is due to the electron impact ionization and electron movement. The electron density was observed to increase with increasing discharge voltage while the electron temperature remained approximately,. At 800 V and 50 mTorr argon glow discharge, T-e ranged from 15 to 52 eV and N-e, ranged from 62 x 10(6)/cm(3) to 3.1 x 10(8)/ cm(3) in the DC glow discharge, and T-e and N-e were dependent on the axial position.
關聯:	PLASMA CHEMISTRY AND PLASMA PROCESSING Volume: 22 Issue: 2 Pages: 297-311
显示于类别:	[化學工程與材料工程學系暨碩士班] 期刊論文

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