Measurement of spatial distributions of electron density and electron temperature in direct current glow discharge by double langmuir probes

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Title:	Measurement of spatial distributions of electron density and electron temperature in direct current glow discharge by double langmuir probes
Authors:	Tao W.H. Yasuda H.K.
Contributors:	材料所
Keywords:	glow discharged plasma diagnostic double Langmuir probe electron temperature electron density
Date:	2002
Issue Date:	2009-12-07 11:35:22 (UTC+8)
Abstract:	The spatial distributions of electron temperature and density in a dc glow discharge that is created by a pair of planar electrodes were obtained by using double Langmuir probes, The contribution of double Langmuir probes measurement is to provide a relatively, quantitative tool to identify the electron distribution behavior. Electrons gain energy, from the imposed electric field, and electron temperature (T-e) rises very sharply,from the cathode to the leading edge of the negative glow where T-e reaches the maximum. In this region, the number of electrons (N-e) is relatively small and does not increase much. The accelerated electrons lose energy, by ionizing gas atoms, and T-e decreases rapidly from the trailing edge of the negative glow and extends to the anode. N-e was observed to increase from the cathode to the anode, which is due to the electron impact ionization and electron movement. The electron density was observed to increase with increasing discharge voltage while the electron temperature remained approximately,. At 800 V and 50 mTorr argon glow discharge, T-e ranged from 15 to 52 eV and N-e, ranged from 62 x 10(6)/cm(3) to 3.1 x 10(8)/ cm(3) in the DC glow discharge, and T-e and N-e were dependent on the axial position.
Relation:	PLASMA CHEMISTRY AND PLASMA PROCESSING Volume: 22 Issue: 2 Pages: 297-311
Appears in Collections:	[Department of Chemical & Materials Engineering] journal articles

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