In this study, the fabrication process, structure analysis of porous silicon and its applications are investigated. The iron coil and PVC materials are used to form a HF electrolyte container. Optical microscopy and reflectance are measured on the porous silicon. Also, the Photo-response of UV light excitation are researched. The electrical characteristics of the porous silicon with metal contacts are analyzed. In addition, the photolumin properties method of different porous silicon structures are proposed. Excellent experiment results are obtained. Such, a new type of Si-based heterostructure is obtained by electrochemical oxidation of monocrystalline silicon in concentrated hydrofluoric acid solutions. The different porous silicon structure can be obtained with properly variations of etching parameters such as current density, concentration of etching solvent and light illumination during etching process. In addition, it is found that the ITO coating would blue-shift the photolumin
