| 摘要: | 經由 XRF、XRD 之螢光擾射儀及 X 光繞射儀器分析，我們確認矽石質坩鍋 的成分中 99%為二氧化矽，晶相為方石英，是常見陶瓷材料。方石英除氫氟酸和
熱磷酸外，不易與其它酸性物質起反應，且具耐高溫、耐熱震、熱膨脹係數小的
特性。在科技發展以及綠色能源太陽能版的高需求下，矽晶圓長晶的技術已經相
當純熟，而矽石質坩鍋是矽晶圓長晶的重要容器，為積體電路製程中至關重要的
角色，但大量的長晶需求無可避免的伴隨大量的廢棄坩鍋生成，不但需要付出每
噸 2000~30000 的處理或掩埋成本，易造成資源浪費。將廢棄矽石質坩鍋回收再
利用製成耐酸磚，不但可以降低事業廢棄物，還可以創造廢石英的新生命，幫助
解決台灣地區工業需求，符合環保及經濟雙效之循環經濟價值。
本實驗將矽石質坩鍋的廢棄物經由破碎、研磨後形成再生石英粉，而後加入
不同來源的黏土、助熔劑，嘗試調配不同比例的配方，可以製作出符合 CNS6514 標準規格之耐酸磚。實驗最後得出----以重量百分比 25-45%石英坩鍋再生石英粉 +25-45%助熔劑#I+30%黏土 B，外加水均勻混拌後，所壓製、燒結出來的再生耐
酸磚吸水率、氣孔率最低，甚至優於原生石英粉所製作之試驗磚，且抗酸腐蝕性、
抗壓強度等測定值都符合 CNS6514 規範。證明廢矽石質坩鍋再生石英粉為製作
耐酸磚的優良再生材料。
Through XRF and XRD X-ray circumference analysis, weconfirmed that 99% of the composition of the silica crucible is silicon dioxide, and the crystalline phase is cristobalite, which is a common refractory material. In addition to hydrofluoric acid and thermal phosphoric acid, cristobalite is not easy to react with other acidic substances, and has the characteristics of high temperature resistance, thermal shock resistance, and thermal expansion with a small number, which is an effective material for resisting acid. Under the development of science and technology and the high demand for green energy solar energy version, the technology of silicon crystal growthhasbecomequitemature, andsiliconcrystal crucibleisanimportantcontainer for silicon crystal crystal growth, which plays a crucial role in the process of accumulation power circuit, but the large demand for crystal growth is inevitably accompanied by the generation of a large number of waste crucibles. Recycling and reusing discarded silica crucibles into acid-resistant equipment can not only reduce industrial waste, but also create a new life for waste quartz, help solve the industrial needs of Taiwan, and meet the circular economic value of environmental protection andeconomicefficiency. In this experiment, the waste material of the silica crucible is crushed and ground toform recycledquartzpowder, thenclayandflux fromdifferentsources areadded, and the formula of different proportions can be adjusted to make acid-resistant bricks that meet the CNS6514 standards. The experimental results show that the water absorption and porosity of the regenerated acid-resistant bricks are the lowest and even superior to those made by primary quartz powder with a weight percentage of 25-45% quartz crucible + 25-45% flux #I + 30% clay B, and the measured values of acid corrosion resistance and pressure resistance are in line with the CNS6514
V
standards.It isprovedthatwastesilicacruciblerecycledquartzpowderisanexcellent recycledmaterialformakingacid-resistantbricks. |
