| 摘要: | 本研究為製備氧化銪(Eu2O3) 、氯化銪(EuCl2)及氧化銪(Eu2O3)和氯化銪(EuCl2) (EuCl2/Eu2O3)之混合物直接滴定塗佈(drop-coating)於氧化鋁基板(alumina substrate)上製備阻抗型濕度感測器。並探討Eu2O3、EuCl2及(EuCl2/Eu2O3)混合物的成份比例對阻抗型濕度感測器的電性及濕度感測特性的相關性。利用X射線繞射儀(XRD)和掃描電子顯微鏡(SEM)來分析EuCl2/Eu2O3混成膜之表面特徵及其材料結構特徵。並利用量測EuCl2/Eu2O3混成膜之相對濕度對電性的函數，進一步探討EuCl2和Eu2O3之間比例對於EuCl2/Eu2O3混成膜之電性和濕度感測特性，以證明良好材料特性、線性、濕滯、響應/恢復時間、環境溫度的影響、外加頻率和穩定性的影響。最後利用阻抗頻譜圖用於研究EuCl2/Eu2O3混成膜的濕度感測機制，由結果可知其感濕機制為鋞離子(hydronium ion, H3O+)傳導為主。
Impedance-type humidity sensors based on EuCl2, Eu2O3 and EuCl2/Eu2O3 blend films were fabricated. The electrical properties of the pure EuCl2 and Eu2O3 films and EuCl2/Eu2O3 blend film that was blended with different amounts of EuCl2 were investigated as functions of relative humidity. The influences of the EuCl2 to the humidity-sensing properties (sensitivity and linearity) of the EuCl2/Eu2O3 blend film were thus elucidated. The impedance-type humidity sensor that was made of a 7 wt% EuCl2/Eu2O3 blend film exhibited the highest sensitivity, best linearity, a small hysteresis, a fast response time, a small temperature coefficient and long-term stability. The complex impedance plots were used to elucidate the role of ions in the humidity-sensing behavior of the EuCl2/Eu2O3 blend film. |
