陶瓷板材機製微孔製程為半導體測試產業之一項重要技術，用以製作晶圓探針卡上的探針基板(probe head)所需的微孔陣列，以導引測試探針完成正確的晶圓電路測試程序。文獻中，許多學者應用實驗方法探討機製鑽削程序之最佳參數，「切削速度」與「刀具進給率」被認為是影響切削特性與微孔品質的兩項重要參數。機製微孔的製作，須以啄鑽程序完成，加工中的「啄鑽深度」影響著切屑長度與整體切削時間，這三項參數設定為本研究之分析參數。
本研究設置力感測器討論啄鑽製程的切削推力，並使用影像量測儀獲得微孔孔徑、真圓度與位置度誤差的量測資訊，藉由田口方法的因子水準效應分析，瞭解三項參數與分析特性之關聯性。在應用田口方法進行參數分析時，因子間的交互作用極有可能會影響到分析特性的評估結果，但文獻中多未列入考量。本文進行三階段的鑽削實驗：首先執行三項控制因子之二水準「交互作用實驗」，仔細探討因子間的交互性；在釐清交互作用後，執行三水準之部分因子「微鑽參數實驗」，藉由變異數分析判斷出顯著因子與評估實驗誤差，並執行「驗證實驗」確認所推論出之較適微鑽參數組合。
此外，本文結合田口實驗數據與灰關聯分析法，提出面對多特性問題時之最適啄鑽參數設計。相關實驗資料與研究成果可做為陶瓷板微鑽製程啄鑽參數規劃之參考。
Mechanical microdrilling process of a ceramic sheet is an important technique in semiconductor testing industry, which uses to fabricate the microhole array requiring in the probe head on a wafer probe card. Theses microholes are used to lead the microprobes to fulfill the circuit conduct test exactly. In literatures, many researches applied experimental methods to derive the optimal parameters in mechanical drilling processes. Both the cutting speed and tool feed rate are always considered as the substantial parameters affecting the machining characteristics and hole quality. In making a high-aspect ratio microhole, the operation must be carried out by a peck-drilling process. The drilling depth in peck drilling affects the chip length and the whole cutting time. The three parameters mentioned were selected as the parameters analyzed in this study.
This study installed a force sensor to analyze the thrust force in the peck drilling, and used an image measuring instrument to measure the microhole’s characteristics including hole diameter, roundness, and position error, and through the factor level analyses in characteristics method to discuss the correlations between the three parameters and the the Taguchi’s analyzed. While uses experimental methods in parametric analyses, mutual interaction among the factors may influence analytical results. However, they are usually to be neglected in most studies. This study conducted three stages microdrilling experiments. A two-level factorial experiment was first performed to investigate the interactions among the three control factors. After clearing up their interactions, the second experiment was a three-level factional factorial Taguchi’s experiment for analyzing the parameters in peck drilling to find the preferred factor level combination for the characteristic specified. The significant factors and experimental error were judged by the ANOVA method. In the final, confirmation experiments were implemented to verify the preferred parametric combination inferred.
In addition, this study combined the results from the Taguchi’s experiment and grey relation analysis method to derive the optimal parametric design for the multi-charactenstic proldem in the microhole fabrication. All the experimental data and analytical results provide available references for the parameter planning of the microdrilling process of a ceramic sheet.
