| 摘要: | 「微孔陣列」為工業產品之重要特徵，常應用於汽車、航空、電子產業之儀器或設備上。本研究旨在建立微孔陣列之位置度自動化光學檢測系統(AOI)，進行微孔之位置度誤差評估。系統由數位影像擷取設備、X-Y 微動平台、馬達與驅動組、控制系統所組成。微動平台的兩個軸向以伺服馬達驅動，搭配Renishaw光學線性尺，以可程式控制器(PLC)進行順序控制;並根據CNS 14636之定位精度與重現性檢驗規範評估，精度可達±10μm。為了使用影像量測法評估微孔的位置度誤差，於微孔軸線方向(測定面法線方向)架設CCD影像擷取裝置；CCD與平台整合後，即可自動地記錄各微孔的影像資料；然後，計算出受測微孔的孔徑與圓心位置，並評估出它們的位置度誤差。本研究製作兩組Ø800μm之矩形與環形陣列，以測試系統之量測功能。本文自行所開發之AOI系統已達成微孔陣列位置度誤差自動化檢測之目標。
Microhole array is an important component feature applied in various instruments or devices in automatic, aviation, and electronic industrial. The purpose of this study was to establish an automatic optical inspection (AOI) system for measuring the position error of the microhole examined. The system was consisted of the image acquisition device, X-Y micro-motion platform, motors and driving set, and control system. Two axles of the platform were driven by servo motors and coupled with optical linear scales, and using the programmable logic controller (PLC) conducted the sequence control. Precision of the platform developed was achieved 10μm checking based on the specification of positioning precision and repeatability ruled in CNS 14636. In order to evaluate the position error of the microhole by digital image measurement methods, an image charge-couple device (CCD) was installed along the axle of the hole (the normal direction of the surface measured). After the integration of CCD and platform, images of the holes examined can be recorded one by one. The diameter and center location of the hole were calculated, and then the position error was derived. Two plates with a rectangle array and a circular array of Ø800μm microholes were made in this study to verify the system’s functions. The AOI system developed has accomplished the objective of automatic measurement of a microhole array. |
