本研究製備三氧化鎢奈米粒子(WO3NPs)分別添加氫氧化鉀(KOH)及金奈米粒子(AuNPs)製成兩種奈米複合材料，並將其奈米複合材料塗佈於氧化鋁基板上製備為阻抗型濕度感測元件。WO3NPs透過添加KOH及AuNPs改善感測器的靈敏度、線性及電性。利用分子吸附動力學(Molecular adsorption dynamic)探討水分子在KOH/WO3NPs和AuNPs/WO3NPs的吸附特性，由結合常數K證明WO3NPs添加KOH比添加AuNPs對水分子有更高的靈敏度。KOH/WO3NPs所製備的感測器擁有高靈敏度、良好的線性、濕滯現象小、反應及恢復時間短及良好的長期穩定。最後使用阻抗頻譜圖，確認其感測器之電子傳導機制。
Impedance-type humidity sensors made of WO3 nanoparticles (WO3 NPs) that was added with KOH or Au nanoparticles (Au NPs). The humidity-sensing (sensitivity and linearity) and electrical properties of the WO3 NPs was improved and investigated by adding with KOH and Au NPs. Adsorption dynamic analysis and molecular mechanical calculations were used to elucidate that the sensitivity of K+ ion-added WO3 NPs was higher than that of Au NPs-added WO3 NPs. The sensor that was made of the K+ ion-doped WO3 NPs layer exhibited favorable impedance, high sensitivity, good linearity, small hysteresis, a short response/recovery time and high long-term stability over the humidity range studied. Complex impedance spectra were used to investigate the humidity-sensing mechanism of the K+ ion-added WO3 NPs layer.
