| 摘要: | 全自動虛擬量測(AVM)系統具備了自動化資料擷取、自動化資料品質評估、虛擬量測模型建置、自 動化模型散出及自動化模型更新等能力，可促進虛擬量測的全廠部署與運作，已成功應用於半導體製 造、面板製造及工具機加工之生產品質監測。然而，現行AVM系統中用以建立虛擬量測模型（VM Model) 之建模伺服器（Model Creation Server)具有一些侷限，需要進一步改進，以使AVM系統更符合製造 業之需求，例如：（1)建模伺服器裝載於實體伺服器中，無法隨需地增加其數量，以因應較多的建模 需求；（2) —台建模伺服器同一時間只能處理一個建模請求，無法支援多人同時建模；（3)—台實體伺 服器只裝載一個建模伺服器，其CPU使用率低，未能充分利用運算資源。近年來，雲製造(Cloud-based Manufacturing)已成為熱門的研究議題及新一代的製造典範(Paradigm)，其主要概念乃是將分散的製 造資源（可為軟體或硬體）封裝及虛擬化成可透過網路隨需存取之雲端服務，可為製造業在產品設計、 製造及機台工程應用帶來創新應用及商業利益。參考雲製造的概念，本研究計晝將利用VMWare虛擬 化技術與軟體，以及XML、Web Service、SOA、HTML5、Multi-tenancy等IT技術，研發一個【基於 私有雲之全自動虛擬量測多租戶建模服務】，將可有效解決上述缺失，使得AVM系統能夠支援多人同 時建模、可隨需增加建模伺服器的數量及大幅提高虛擬機之CPU使用率。在學術理論及方法上，本計 晝將可建構出發展全自動虛擬量測多租戶建模雲端服務之系統化方法；在實際應用上，本計晝將建置 應用於半導體製造及工具機加工之多人同時建模之產業應用範例。預期，本計晝之研究成果可使虛擬 量測朝向雲製造之概念發展，並對製造業深具利用性。
An AVM (Automatic Virtual Metrology) system has capabilities of automatic data acquisition, automatic data quality evaluation, VM model creation, automatic model fanning out, and automatic model refreshing so that it can facilitate factory-wide VM deployment and operations. AVM systems have been successfully applied to the production quality monitoring of semiconductor manufacturing, TFT-LCD manufacturing, and machine tool machining. However, the model creation (MC) server of the existing AVM system suffers the following shortcomings, which should be further improved for making the AVM system more in line with the needs of manufacturing industries: (1) the MC server is installed in a physical server whose quantity cannot be increased on demand for responding to more MC requests, (2) the MC server can only handle a MC request per time and cannot support multiple users to simultaneously create their VM models, and (3) the physical MC server has a low CPU usage rate because the physical server is installed with only one MC server, failing to make full use of computing resources. In recent years, cloud-based manufacturing (CM) has become a hot research topic and a new-generation manufacturing paradigm. The key concept of CM is to encapsulate and virtualize distributed manufacturing resources (including software and hardware) as cloud services which can be accessed on demand by users and applications. CM can bring manufacturing industries innovative applications and commercial benefits in product design and manufacturing, as well as in equipment engineering applications. By referring to the concept of CM, this project will utilize VMWare’s virtualization technology and software, as well as several IT technologies (including XML, Web Service, SOA, HTML5, and Multi-Tenancy), to develop a multi-tenant model creation service for AVM based on private cloud for effectively resolving the above-mentioned shortcomings of the MC server. The developed model creation service will allow the AVM system to support multiple users to create VM models simultaneously, to increase or decrease the number of MC servers on demand, and to significantly increase the CPU usage rate of the virtual machine hosting the MC server. In the aspect of academic theory and methodology, this project will create a systematic approach of developing a multi-tenant model creation service for AVM. On the other hand, in the aspect of practical application, this project will create two industrial application examples of multiple users creating VM models simultaneously for semiconductor manufacturing and machine tool machining, respectively. It is expected that the research results of this project will allow the development of VM to be towards the concept of CM and will be highly applicable to manufacturing industries. |
