本篇論文中，我們主要是利用陽極氧化鋁基版(AAO)為基板，以電鍍方式置入鎳、鐵及鑭催化劑來合成奈米碳管。因陽極氧化鋁基版的孔洞具有高密度排列的性質，使催化劑可達到奈米級而成長奈米碳管。在基板製程，我們以二次陽極處理，及負電壓氧化還原法達到擴孔通底的基板，而通底的基板有利於電流的流通及電子場發射。
以鎳、鐵及鑭催化劑金屬粒子成長的奈米碳管，碳管產量會隨時間延長而增加，而奈米碳管的直徑因受限於孔洞的限制，在各種成長時間下所呈現出一致的直徑;而且本論文是第一個以鑭金屬催化劑成功成長奈米碳管的研究。以三種催化金屬粒子在不同時間所成長出來的奈米碳管，由拉曼光譜的ID/IG值來看，其成長時間拉長、其值越小，代表G-band越多，奈米碳管的結晶性也越佳。
比較三種催化劑金屬粒子成長的奈米碳管在電子場發射量測的差異，發現較好的為鐵及鑭。以這兩種金屬粒子進行成長奈米碳管，將有利於電子場發射條件上的改良。以這兩種金屬粒子配合時間與基板的製程，將會有很好的電子場發射效能。
利用氧化鋁做為奈米級模板，將催化劑以電鍍方式填入孔洞內，控制碳管直徑與間距，解決了屏蔽效應。利用緩衝層鈦金屬做為電極，改善碳管與電極的接觸問題，提升電流密度。用簡單的CVD設備，成功的成長出具高密度排列的奈米碳管模板，且具有良好效能的產品。
In this thesis, we grow carbon nanotubes on anodic alumina oxide (AAO) substrate by electro-deposited Nickel, Iron and Lanthanum catalysts in its pores. Because anodic alumina oxide (AAO) its pores are highly ordered. We anodized the aluminum thin film two times and penetrate pores to contact with the buffer layer of substrate by reversed-bias method. By this way, it can provide the better connection for electric current and electron field emission.
Carbon nanotubes, which were grown with Nickel, Iron and Lanthanum catalysts, the amounts of carbon nanotubes will increase when we prolong the time. In the all processing, the diameters of nanotubes are limited to the pores’ sizes and it is independently growing time. It means that the pores’ dimension can provide one way to control the nanotubes diameters by controlling the catalysts’ size. And this thesis is the first one that we successfully grew nanotubes with Lanthanum metal catalyst. We analyzed the Raman Spectrum of nanotubes, which are growing with three kinds of catalysts and several processing times. The spectrum data shows that the ratio of ID/IG. is decrease with the processing time. It means the crystallization of samples is better when the ratio of ID/IG. is decreasing.
Comparing the several carbon nanotubes grown with three kinds catalysts, it showed the better results by using Iron and Lanthanum catalysts. We can improve the electron field emission by using these two catalysts. It can advance the efficacy of electron field emission.
By using anodic alumina oxide (AAO) substrate as nanoscale templates, we electro-deposited three kinds catalysts into its pores in order to control CNTs’ diameter and distance, which can avoid the shielding effect. Because the buffer layer “titanium” can provide for electrode within refilled the catalyst and better connections for field emission, so that it can ameliorate the current density of field emission. With the basic CVD, we have successfully grown highly ordered and well-functioned CNTs’ substrate.
