Influence of substrate bias, deposition temperature and post-deposition annealing on the structure and properties of multi-principal-component (AlCrMoSiTi)N coatings

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Title:	Influence of substrate bias, deposition temperature and post-deposition annealing on the structure and properties of multi-principal-component (AlCrMoSiTi)N coatings
Authors:	Chang, Hui-Wen Huang, Ping-Kang Yeh, Jien-Wei Davison, Andrew Tsau, Chun-Huei Yang, Chih-Chao
Contributors:	化材系
Keywords:	nanostructure high-entropy alloys nitride coatings sluggish diffusion anneal hardening thermal stability
Date:	2008
Issue Date:	2009-11-06 14:44:02 (UTC+8)
Abstract:	Nitride films are deposited from a single equiatomic AlCrMoSiTi target by reactive DC magnetron sputtering. The influence of the substrate bias and deposition temperature on the coating structure and properties are investigated. The bias is varied from 0 to -200 V while maintaining a substrate temperature of 573 K. And the temperature is changed from 300 to 773 K whilst maintaining a substrate bias of - 100 V From X-ray diffraction analysis, it is found that all the as-deposited coatings are of a single phase with NaCl-type FCC structure. This is attributed to the high mixing entropy of AlN, CrN, MoN, SiN, and TiN, and the limited diffusion kinetics during coating growth. Specific aspects of the coating, namely the grain size, lattice constant and compressive stress, are seen to be influenced more by substrate bias than deposition temperature. In fact, it is possible to classify the deposited films as large grained (similar to 15 nm) with a reduced lattice constant (similar to 4.15 angstrom) and low compressive residual stresses for lower applied substrate biases, and as small grained (similar to 4 mn) with an increased lattice constant (similar to 4.25 angstrom) and high compressive residual stresses for applied biases of - 100 V or more. A good correlation between the residual stress and lattice constant under various deposition conditions is found. For the coatings deposited at - 100 V, and at temperatures above 573 K, the hardness could attain to the range of 32 to 35 GPa. Even after annealing in vacuum at 1173 K for 5 h, there is no notable change in the as-deposited phase, grain size or lattice constant of the coatings but an increase in hardness. The thermal stability of microstructure is considered to be a result of the high mixing entropy and sluggish diffusion of these multi-component coatings. For the anneal hardening it is proposed that the overall bonding between target elements and nitrogen is enhanced by thermal energy during annealing. (c) 2007 Elsevier B.V. All rights reserved.
Relation:	SURFACE & COATINGS TECHNOLOGY Volume: 202 Issue: 14 Pages: 3360-3366
Appears in Collections:	[Department of Chemical & Materials Engineering] journal articles

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