導電高分子力量感測器之研究

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Title:	導電高分子力量感測器之研究 udy of foree sensor for conductive polymer
Authors:	傅書煥
Contributors:	數位機電科技研究所
Keywords:	聚二甲基矽氧烷 PDMS
Date:	2013
Issue Date:	2013-03-16 13:51:18 (UTC+8)
Abstract:	在這篇研究論文當中，架構出一種新式高感度電阻式壓力感測器之構造，而且將這種技術使用在高分子材料聚亞醯胺(Polyimide PI)板材之壓力感測陣列，這種創新式的構想，不但成本較一般商業化運轉之機器低廉之外，更具有簡易製造的特性，適用於作為壓力感測。電阻式壓力感測器的製造技術，是採用微機電的製程以及黃光微影製程的技術。感測器元件的構造是由上半部的軟模(聚二甲基矽氧烷(polydimethylsiloxane PDMS)層以及下半部由聚亞醯胺(Polyimide，PI)板材所構成。電阻式感測器是透過聚二甲基矽氧烷薄膜的變形量，配合美商國家儀器的模組化儀器，來感測外力所產生的變化量。本研究中也同時由美商國家儀器所開發之數位多工器組合成的掃描電路來做多點的同步讀取，並針對感測陣列的各項特性做探討。 This thesis is to study about piezoelectric sensor. We construct a kind of structure for sensitivity resistive pressure sensors and it uses a sheet of polymer materials. It is pressure sensing array use by polyimide (PI). The innovative idea is not only low-cost commercialization, but also easy manufacturing. Resistive pressure sensor manufacted by MEMS processes and photolithography process technology. The sensor element is compose of upper soft PDMS layer and the lower polyimide (PI) sheet resistive sensors is through amount of deformation of a PDMS film. With the NI digital instruments sense measured many point for external forces. The study also developed by NI digital scan circuit to multi-point synchronous read to investigate the characteristics of the sensing array.
Appears in Collections:	[Department of Mechanical Engineering ] thesis

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