An impedance-type humidity sensor was made using K+-nano-mica film. Complex impedance spectra were obtained to analyze the humidity sensing and electrical properties of the humidity sensor. The sensor had a high sensitivity and its sensing-linearity depended on the applied frequency. The temperature dependence between 15 and 35 degrees C was from -0.1%RH/degrees C to -0.67%RH/degrees C at 20-90%RH, respectively. The sensor exhibited a small hysteresis, a fast response time and good long-term stability. The different complex impedance plots obtained at low and high relative humidity indicated that the ions dominate the conductance of the K.-nano-mica film. (C) 2011 Elsevier B.V. All rights reserved.
關聯:
SENSORS AND ACTUATORS B-CHEMICAL 卷: 161 期: 1 頁數: 838-844
