文化大學機構典藏 CCUR:Item 987654321/24138
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    jsp.display-item.identifier=請使用永久網址來引用或連結此文件: https://irlib.pccu.edu.tw/handle/987654321/24138


    题名: Process Simulation-Assisted Fabricating Micro-Herringbone Grooves for a Hydrodynamic Bearing in Electrochemical Micromachining
    作者: Chang, DY (Chang, Dar-Yuan)
    Shen, PC (Shen, Ping-Chen)
    Hung, JC (Hung, Jung-Chou)
    Lee, SJ (Lee, Shuo-Jen)
    Tsui, HP (Tsui, Hai-Ping)
    贡献者: Dept Engn Mech
    关键词: Electrochemical micromachining
    EMM process simulation
    Distribution of electric field
    Hydrodynamic bearing
    Micro-herringbone groove
    日期: 2011
    上传时间: 2013-02-18 11:51:13 (UTC+8)
    摘要: This study presents the process simulation of fabricating a herringbone groove in a hydrodynamic bearing by electrochemical micromachining (EMM) process. The finite element simulation involved the multiphysics of a chemical reaction, a static electrical field, and electric current density. A dedicated EMM system was established for this study. The groove pattern on the cathode tool was transferred to the internal side of the bearing (anode) by anodic dissolution. The width of the microgroove was selected as a quality index to explore the effects of the process parameters, such as cathode tool, interelectrode gap, voltage intensity, and the pulse rate of the applied voltage, on the electric field distribution and groove fabrication. The experimental results show that the proposed micromachining system has an electrochemical processing rate of k = 1 x 10(-11) m(3)/C, and could complete the micro-herringbone groove fabrication of 11 mu m depth in 0.85 seconds. The simulation results were comparable to those of the experiment. The numerical simulation can be used to design the cathode tool and the parametric selection for the microgroove fabrication of hydrodynamic bearings.
    關聯: MATERIALS AND MANUFACTURING PROCESSES 卷: 26 期: 12 頁數: 1451-1458
    显示于类别:[機械工程系暨機械工程學系數位機電研究所] 期刊論文

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