Synthesis of Tungsten Oxide Nanoslab Bundles by Microwave Plasma-Enhanced Chemical Vapor Deposition

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Title:	Synthesis of Tungsten Oxide Nanoslab Bundles by Microwave Plasma-Enhanced Chemical Vapor Deposition
Authors:	Hsieh, YT (Hsieh, Yun Tsung) Hsueh, SH (Hsueh, Sen Hung) Chen, US (Chen, Uei Shin) Huang, MW (Huang, Meng Wen) Shih, HC (Shih, Han C.)
Contributors:	Dept Chem & Mat Engn
Keywords:	NANOWIRE ARRAYS NANORODS GROWTH NANOTUBES
Date:	2011-01
Issue Date:	2013-02-18 10:10:10 (UTC+8)
Abstract:	A large quantity of tungsten oxide nanoslabs was synthesized within 4 min by microwave plasma-enhanced chemical vapor deposition (MPECVD). The structural, geometrical, and chemical compositions of these nanoslabs were characterized by X-ray diffraction (XRD), transmission electron microscopy (TEM), energy-dispersive X-ray spectroscopy (EDS), and Raman spectroscopy. The results of these characterizations confirmed that the nanoslabs with [010] as the major growth direction have a W18O49 structure with thicknesses of 30-50 nm, widths of up to 300-500 nm, and, lengths of up to 800-2000 nm. In XRD spectra, the reflection peaks are representative of monoclinic W18O49. A vapor-solid (VS) mechanism was confirmed for this growth process because no catalyst was used in this growth process. (C) 2011 The Japan Society of Applied Physics
Relation:	JAPANESE JOURNAL OF APPLIED PHYSICS 卷: 50 期: 1 特刊: SI 文獻號碼: 01AB05
Appears in Collections:	[Department of Chemical & Materials Engineering] journal articles

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