沉積類鑽碳膜作為高分子材料的硬質鍍膜保護應用

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Title:	沉積類鑽碳膜作為高分子材料的硬質鍍膜保護應用 Diamond-Like Carbon Coated on Polymeric Materials for Protection Applications
Authors:	施漢章
Contributors:	化學工程與材料工程學系
Keywords:	過濾式陰極電弧沉積系統 (FCVA) 類鑽碳膜 (DLC films) 高分子材料 (polymeric materials) 類鑽碳膜陰極電弧硬質膜機械性質抗磨耗
Date:	2010-08
Issue Date:	2012-03-06 15:43:00 (UTC+8)
Abstract:	類鑽碳膜由sp2 及sp3 鍵混成的非晶質碳結構，並且有著優異的機械性質、化學穩定性、高透光性、優異的導熱性及極佳的生物相容性。因此，此材料目前已廣泛地應用在光學玻璃、硬碟、汽車零件、生醫材料、微機電等材料的保護上。然而，對於軟質材料的保護卻是較少被作為應用使用。本計畫「沉積類鑽碳膜作為高分子材料的硬質鍍膜保護應用」為一年期計畫，是希望能將類鑽碳膜材料鍍製在軟質的高分子基材以及塑膠複合材料上做為材料表面的保護，例如：作為安全玻璃鏡片應用的PMMA 高分子材料，其硬度小於1 GPa，表面極易刮傷，因此可藉由在PMMA 表面鍍上具有高強度的類鑽碳膜作為保護，可提升高分子材料的應用性與價值。由於過濾式陰極電漿電弧系統的優勢是能夠在室溫下快速地合成低粗糙度之類鑽碳膜 (鍍率>20 nm/min)。所以，對於高分子材料並不會帶來任何結構損壞。成功地在高分子基材上合成此類鑽碳膜後，將對於鍍膜前後的化學組成、表面粗糙度、機械強度、抗磨耗、透光性、熱導性作一系統之分析與探討。本計畫在執行上可分為三個階段執行： 1. 藉由過濾式陰極電弧電漿沉積系統於各類高分子基材上合成類鑽碳膜，並改變添加氣體流量、基材偏壓、成長時間等合成參數。 2. 於成長過程中，通入Ar、N2、CF4 等氣體；或藉由靶材加工技術，將各類非金屬及金屬元素(如: Ti、Cu、Ag)加入於類鑽碳膜內並沉積於高分子基材上。 3. 藉由儀器分析上述所合成之薄膜的化學組成、表面粗糙度、機械強度、抗磨耗、透光性、熱導性。 inertness, optical transparency, thermal conductivity and biocompatibility. Therefore, it has been widely used as protective coatings for optical windows, hard disks, automobiles, biomaterials and MEMs. However, there is hardly any report on the application of DLC as hard coatings depositing on soft materials like polymers. The proposal entitled ” Diamond-like carbon coated on polymeric materials for protection applications” is an one-year project to deposit DLC films as protective coatings on soft polymer substrates to strengthen the significance of the materials. For example, PMMA is a kind of polymeric materials and has been widely used for safe eye glasses. Its hardness is as lower as 1 GPa, which is easily damaged by wearing. Therefore, it is necessary to deposit high hardness and low friction amorphous carbon films on PMMA to protect the soft polymers. Moreover, the advantage of the filtetred cathodic vacuum arc is that the DLC films can be synthesized at room temperature with a low operating duration, and the integrity of the polymer sensitive materials therefore will not be changed or even destroyed. After each depositing, the chemical composition, surface roughness, mechanical strength, wear, optical transparency and thermal conductivity of the coated DLC films are evaluated and compared systemically in this research. This proposal will be executed in three stages: 1. The DLC films are deposited on various polymer substrates using a filtered cathodic vacuum arc (FCVA) system with varying gas flow rate, substrate bias voltage and synthesis duration. 2. N, F are incorporated into the DLC films by using the precursors of CF4 and N2, while the metal elements (Ti, Cu, Ag) are doped into the films using the mixed target techniques. 3. The chemical composition, surface roughness, mechanical strength, anti-wear, optical transparency and thermal conductivity of the as-synthesized films are evaluated and compared.
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