Heating-Assisted for Ultrasonic Nanoimprint Lithography

文化大學機構典藏 CCUR > 理工學院 > 工學院 > 機械工程系暨機械工程學系數位機電研究所 > 期刊論文 > Item 987654321/20978

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题名:	Heating-Assisted for Ultrasonic Nanoimprint Lithography
作者:	Lin, CH (Lin, Chien-Hung) Wang, CY (Wang, Chih-Yu) Chen, RS (Chen, Rongshun)
贡献者:	機械系
关键词:	VIBRATION
日期:	2010-12
上传时间:	2011-12-12 09:27:59 (UTC+8)
摘要:	We demonstrate the heating-assisted for ultrasonic nanoimprint lithography (U-NIL) to overcome the insufficient energy from ultrasonic vibrations for a little time occurring in U-NIL. The heating assistance benefits U-NIL and does not affect the process time because the hot plate dose not be heated and cooled during imprinting process. Using poly(ethylene terephthalate) (PET) film as imprinted polymer, we have compared imprinted results between heating-assisted U-NIL and U-NIL. Furthermore, the experimental results show that the temperature of hot plate and the imprinted force have a great effect on the imprinted pattern depth and uniformity. We conclude that the proposed heating-assisted U-NIL process has the potential to improve and advance U-NIL.
显示于类别:	[機械工程系暨機械工程學系數位機電研究所] 期刊論文

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