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題名: | Plasma-enhanced chemical vapor deposition carbon nanotubes for ethanol gas sensors |
作者: | Hu, CT (Hu, Chia-Te) Liu, CK (Liu, Chun-Kuo) Huang, MW (Huang, Meng-Wen) Syue, SH (Syue, Sen-Hong) Wu, JM (Wu, Jyh-Ming) Chang, YS (Chang, Yee-shyi) Yeh, JW (Yeh, Jien-W.) Shih, HC (Shih, Han-C.) |
貢獻者: | 化材所 |
關鍵詞: | Carbon nanotubes Ethanol Conductance Gas sensor Adsorption Surface modification |
日期: | 2009-02 |
上傳時間: | 2011-12-09 14:16:16 (UTC+8) |
摘要: | Carbon nanotubes (CNTs) have been fabricated by microwave plasma-enhanced chemical vapor deposition for detecting the presence of ethanol vapor. The conductance of the CNTs decreases when the sensors are successively exposed to ethanol vapor at room temperature. The surface of the CNTs was modified in oxygen plasma to elevate the detection sensitivity for ethanol. Successful utilization of CNTs in gas sensors may open a new window for the development of novel nanostructure gas devices. (c) 2008 Elsevier B.V. All rights reserved. |
顯示於類別: | [化學工程與材料工程學系暨碩士班] 期刊論文
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